NSC-2000 PLC controlled table top multi-gun sputtering system
NSC-3000 PC controlled table top multi-gun sputtering system
NSC-4000 PC controlled, stand-alone multi-gun sputtering system
APPLICATIONS :
All types of metal and dielectric coating on wafers, ceramics, glass blanks, and disk heads
Optical coatings with ion sources. Hard coatings with Pulse DC power supplies
Reactive sputtering with RF plasma discharge
DESCRIPTION:
The Sputter Coater NSC 4000 and 3000 are PC controlled, stand-alone systems with water cooled rotating 8" substrate platen; NSC 2000 is a PLC controlled table-top sputtering system. Stainless steel and aluminum chambers are available. The system is pumped with a turbomolecular pump, and within 15-20 minutes a low 10 -6 torr pressure can be reached. The system is also equipped with up to three 2" or 3" planar magnetrons. The RF or DC power is applied to the individual magnetron through a RF switch followed by a manual RF tuner. A manual or stepper motor driven shutter, which protects the unused magnetron during sputtering, is available as an option. The magnetron and substrate distance is adjustable to control uniformity and deposition rate, and the magnetron targets are easily replaceable. An optional thickness monitor is also included.
