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Maintains its temperature distribution within ± 3°C. |
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Can be used for a clean room (class 1000). |
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Achieves vacuum equivalent to 133 Pa or less within 60 seconds. |
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Equipped with a double-element thermocouple for temperature control. |
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Safety |
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Overheat detector function for the heating plate.
Disconnection detector function for the plate heater. |
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Operability |
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Also available for purposes other than photovoltaic cells. |
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Chambers can be opened and closed manually. |
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Effective Processing Area : |
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| PVL0202S |
200mm×200mm |
| PVL0303S |
300mm×300mm |
| PVL0505S |
500mm×500mm |
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