| |
|
| |
|
| |
|
Features : |
| |
|
| |
| Summary |
Si Thin Film Solar Cell System For R&D |
| Features |
- Independent chamber for p-, i-, n- layer
- a-Si, Si oxide, Si nitride using SiH4 or TEOS gas
- Choice of number of chambers to scale production throughput
- Batch approach for large throughput
- Rapid load lock to meet fast process cycle |
| Application |
Solar Cell |
| Description |
Si Thin Film Solar Cell P/I/N layer deposition system |
|
| |
|
